Starting point
Along the entire process chain, closely interconnected data is generated: wafer processes, yield, defect density, equipment performance, process variations. Different questions — yield optimisation, defect pattern analysis, comparing individual process steps — each need their own dashboard.
Problem
- Relevant parameters vary significantly by process step and analysis objective
- Data is distributed across MES, metrology and equipment logs
- The appropriate visualisation format (trend, correlation, comparison) is unclear up front
- Complex interactions between parameters are hard to identify
- Building such dashboards manually is time-consuming and requires deep process and data expertise
Solution
An AI-powered system generates goal-oriented analytics dashboards from a clearly defined question. The user describes the analysis objective — improving yield at wafer level, identifying defect clusters, analysing process deviations. The system identifies the relevant parameters along the process chain, integrates data from MES, metrology and equipment systems, selects the appropriate visualisation format and combines several analysis perspectives. The underlying data stays unchanged and fact-based — only the visualisation adapts to the objective.
Result
- Faster and more precise analysis of yield and defect causes
- Significantly reduced effort for complex dashboards
- More transparency along the entire production chain
- Process deviations and optimisation potential become visible faster